CIS, CIGS, CIGSSe and CdTe Solar PV Thin Film Composition and Thickness Measurement Systems

System SMX is a suite of XRF composition and thickness measurement tools designed exclusively for the photovoltaic manufacturing industry. System SMX comprises a bench top platform (SMX-BEN), an in-line/near-line platform (SMX-ILH) and an in-situ platform for vacuum measurement (SMX-ISI).

All System SMX models are designed around a common machine architecture and operator interface, delivering maximum control, consistency and reproducibility between XRF tools inserted at multiple points in your process.

  SMX-BEN bench top tools are ideal for R&D, process development and failure analysis. SMX-BEN facilitates material selection and recipe formulation in a pre- or early production ramp phase, and supports your SMX in-process tools well into capacity production.
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  SMX-ILH is designed for in-line, post-process atmospheric measurement, enabling control and adjustment of film composition and thickness in real time. SMX-ILH can accommodate flexible (stainless steel and polyimide) and rigid glass substrates; measurements can be performed on stationary or moving substrates for control of blanket or patterned films.
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  SMX-ISI is installed in the clean vacuum section of a line or tool to enable control and yield management of glass or web deposition processes. Solar Metrology offers SMX-ISI configurations for both static point measurement and multiple cross-process flow gradient analysis.
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For detailed information about products and services, or to schedule a product demonstration, please contact Solar Metrology today.

  System SMX-ILH
   Console and remote configurations for
   in-line, near-line and off-line XRF thin film    composition and thickness analysis.