System SMX-BEN  
 


Benchtop XRF Thin Film Composition and Thickness Measurement Systems

System SMX-BEN delivers unsurpassed applications versatility and measurement performance in a compact form factor. It is an ideal choice for R&D, process development and failure analysis,

SMX-BEN facilitates materials selection and recipe formulation in a pre- or early production ramp phase, and excels at intricate analysis of full-panel deposition gradients. SMX-BEN will continue to support your SMX production tool platforms well into capacity production.

General Specifications (subject to change)

(Click on chart to enlarge)

SMX-BEN Model Specs Chart

 

 
 
 Dimensions (Ext.)
 
Interior:
H 22” (56cm) W 20” (50cm) D 30” (75cm)
Exterior:
H 6 ” (15cm) W 13.5 ” (34cm) D 22” (56cm)
Chamber Door Opening:
H 8 ” (20cm) W 15” (38cm)
 Weight

SMX-BEN 1/3: 140 lb (64 kg)
SMX-BEN 2/4: 160 lb (74 kg)

 X-Ray Generation Microfocus .2mm W Be window x-ray tube (Available Cr Be window). 25-50kV, 1.2 mA, 50W HVPS (Available 75W HVPS).
 Collimation SMX-BEN 1/3: Single, fixed.
SMX-BEN 2/4: Up to six (6), motorized and programmable. (Contact Solar Metrology for available sizes and geometries.)
 Primary Filter SMX-BEN 1/3: None (Available single, fixed).
SMX-BEN 2/4: Up to five (5), motorized and programmable
  Motorized Collimator Palette
  Available circular or rectangular collimators
 X-Ray Detector SMX-BEN 1/2: Silicon PIN Diode
  SMX-BEN 3/4: Silicon Drift Detector (SDD)
  Digital Signal Pulse Processing on all models
 Sample Positioning  
SMX-BEN, All:
Z-axis stage with Laser Focusing (6” (150 mm) range); Automatic Crash Protection, LED Sample Lighting, Contrast Auto-Focus.
SMX-BEN 1/3:
Manual X-Y
SMX-BEN 2/4:
Motorized XY, 8” (20cm) range;
Beam to backwall 9” (23cm)
Top Plate
SMX-BEN 1/3: 20” (50cm) x 20” (50cm)
SMX-BEN 2/4: 9” (23cm) x 10” (25cm)
Optics
20/40x magnification, 4 x 3 mm field of view
Software Solar Metrology MIRA XRF software package with FP Analysis, Data Transfer Protocol, Ethernet.
 
 
 

 

 
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  System SMX-BEN
   Benchtop XRF analysis tools.
System SMX-BEN Product Guide
This four
-page brochure contains detailed
product information and specifications.

(Click image to enlarge)


>> Download System SMX-BEN Brochure
      (PDF, 1.5 MB)