SYSTEM SMX ILH/DA (Dual Axis)
Integrated Thin Film Composition and
Thickness XRF Measurement Tools
Composition and thickness analysis
for solar PV metal thin film stacks.
Designed for near-line and
measurements in atmosphere.
Process control and yield management
for flexible and rigid solar PV substrates.
Perform cross-gradient analysis
and control depositions in-line.
Typical measurement applications include:
Mo thickness; all CIGS combinations (including
all pre-selenzation CIG alloys and/or film
combinations and final CIGS formulations);
CdS and related buffer layers.
Integrated and remote ILH configurations are
available for each measurement point in your process.
>> Download System SMX-ILH Brochure
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