SYSTEM SMX ILH/DA (Dual Axis)

Integrated Thin Film Composition and
Thickness XRF Measurement Tools

  Composition and thickness analysis
for solar PV metal thin film stacks.

  Designed for near-line and
in-line measurements in atmosphere.

  Process control and yield management
for flexible and rigid solar PV substrates.

  Perform cross-gradient analysis
and control depositions in-line.

  Typical measurement applications include:  
Mo thickness; all CIGS combinations (including
all pre-selenzation CIG alloys and/or film
combinations and final CIGS formulations);
CdS and related buffer layers.

  Integrated and remote ILH configurations are
available for each measurement point in your process.


>> Download System SMX-ILH Brochure
     (PDF, 4MB)


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