SYSTEM SMX-ISI

In-Situ XRF Composition Analysis and Thickness
Measurement for Solar PV Thin Films

  System SMX-ISI is an enabling technology that
delivers process control essential to CIGS manufacture.

  Installs in a clean vacuum section of a deposition tool
or process line. Easily integrated into any process vessel,
station or point. All components reside outside of vacuum
for optimum performance and serviceability.

  Allows you to correct your process immediately without
losing vacuum, eliminating full-roll efficiency output losses.

  Enables you to scale to production volume while
maintaining conversion efficiencies of resultant PV product.

  Measure in-situ for real-time process control and yield
management on flexible web substrates (such as stainless
steel or polyimide) and rigid PV substrates (such as float glass).

  Typical measurement applications include: Mo thickness;
all CIGS combinations (including all pre-selenzation CIG alloys
and/or film combinations and final CIGS formulations); CdS
and CdS-related buffer layers.


>> Download System SMX-ISI Brochure
     (PDF, 4MB)


Top: SMX-ISI X-Ray Control Station
SMX-ISI instrument electronics,tool communications and
user interface peripherals are housed in a standard form
factor industrial rack.

Bottom: SMX-ISI X-Ray Measurement Head
The x-ray head contains x-ray generation and detection
columns, and has the flexibility to mate with a variety of
vacuum equipment configurations.

The head is mounted in a stainless steel containment vessel.
The vessel provides radiation sheilding and incorporates one
or more vacuum ports allowing x-rays to pass through to
your process tool or line section.

Solar Metrology’s patented vacuum port design dramatically
improves your deposition tool throughput, since tool vacuum
is never affected by the measurement.


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